
Gas product
Home > Business > Gas product
Electromagnetic gas
FRD is a company specialized in manufacturing specialty gas for semiconductors and displays.
GeH4 저메인
Product details

| Product | Specification | |||
| Purity | Package | Valve | Filling Quantity | |
| GeH4 | 5N | 47L | DISS632 | 2.2KG |
| Contaminants | Specifications |
| H2 | ≤1.0 ppm |
| N2 | ≤1.0 ppm |
| O2+Ar | ≤0.5 ppm |
| CO | ≤1.0 ppm |
| THC | ≤1.0 ppm |
| CO2 | ≤.0 ppm |
| Ge2H6 | ≤2.0 ppm |
| Ge3H8 | ≤1.0 ppm |
| Chlorogermanes | ≤5.0 ppm |
| Germoxanes | ≤5.0 ppm |
| H2O | ≤1.0 ppm |