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Electromagnetic gas
FRD is a company specialized in manufacturing specialty gas for semiconductors and displays.
PH3 포스핀
Product details
| Product | Specification | |||
| Purity | Package | Valve | Filling Quantity | |
| PH3 | 99.9999% | 47L | DISS632 | 18KG |
| Contaminants | Specifications |
| AsH3 | ≤0.1 ppm |
| N2 | ≤1.0 ppm |
| O2+Ar | ≤0.5 ppm |
| CO | ≤0.5 ppm |
| CO2 | ≤0.5 ppm |
| THC | ≤0.2 ppm |
| H2O | ≤0.1 ppm |