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Electromagnetic gas
FRD is a company specialized in manufacturing specialty gas for semiconductors and displays.
Xe 제논
Product details

| Product | Specification | |||
| Purity | Package | Valve | Filling Quantity | |
| Xe | 99.9999% | 47L, 50L | CGA580 | 9m3, 10m3 |
| Contaminants | Specifications |
| H2O | ≤1.0 ppm |
| CO2 | ≤1.0 ppm |
| Kr | ≤1.0 ppm |
| Ar | ≤1.0 ppm |
| H2 | ≤1.0 ppm |
| N2 | ≤1.0 ppm |
| C2F6 | ≤0.5 ppm |
| O2 | ≤0.5 ppm |
| CnHm | ≤0.1 ppm |
| CF4 | ≤0.1 ppm |
| SF6 | ≤0.1 ppm |