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Special Gases

Excimer Laser Mix

An excimer is a chemical species that does not bond in the ground state but bonds in an excited state.
These include excimers of the same element bonded as dimers (e.g., F2, Ar2, Kr2, Xe2) and exciplexes of different elements bonded as heterodimers (e.g., ArF, ArCl, KrF, XeCl). These are collectively referred to as excimers.

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  • Product Details
    PRODUCT Specification
    Purity Package Valve Filling Quantity
    CH4 99.999% 47L CGA350 8m3

     

    No Product name
    1 Kr/Ne Mix
    2 Ar/Xe/Ne Mix
    3 F2/Kr/Ne Mix
  • Common product information
    Common product information
    Gas Name Chemical Formula Purity Main Process Application Features / Remarks
    Hydrogen chloride (HCl) HCL 5N Etching process Wafer surface contaminant removal
    Chlorine Cl₂ 5N Metal etching (Al, W, etc.) Strong etching capability
    Fluorine F₂ 5N High-speed metal etching Highly toxic and explosive
    NF₃ NF₃ 4N CVD chamber cleaning process Generation of F after plasma dissociation
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