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Special Gases

FRD is a specialized manufacturer of specialty gases serving
the semiconductor, solar, display, and LED industries.

  • Common product information
    Gas name Chemical formula Purity Key process Features/Remarks
    Hydrogen chloride (HCl) HCL 5N Etching process Wafer surface contaminant removal
    Chlorine Cl₂ 5N Metal etching (Al, W, etc.) Strong etching capability
    Fluorine F₂ 5N High-speed metal etching Highly toxic and explosive
    NF₃ NF₃ 4N CVD chamber cleaning process Generation of F after plasma dissociation

Product information

Special Gases

Excimer Laser Mix
Special Gases

Methane (CH₄)