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Product Details
PRODUCT Specification Purity Package Valve Filling Quantity CH4 99.999% 47L CGA350 8m3 No Product name N2 ≤4.0 ppm C2H6 ≤4.0 ppm O2 + Ar ≤4.0 ppm Co2 ≤0.5 ppm H2 ≤0.5 ppm H2S ≤0.1 ppm H2O ≤3.0 ppm -
Common product information
Common product information Gas Name Chemical Formula Purity Main Process Application Features / Remarks Hydrogen chloride (HCl) HCL 5N Etching process Wafer surface contaminant removal Chlorine Cl₂ 5N Metal etching (Al, W, etc.) Strong etching capability Fluorine F₂ 5N High-speed metal etching Highly toxic and explosive NF₃ NF₃ 4N CVD chamber cleaning process Generation of F after plasma dissociation
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Special Gases
Methane (CH₄)
Methane is the simplest organic compound and the hydrocarbon with the lowest carbon content (and the highest hydrogen content). It is widely distributed in nature and is the primary component of gases commonly known as natural gas, biogas, and peat gas.
- Purity 99.999%
- CAS 74-82-8
- Package 47L cylinder