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Electromagnetic gas
FRD is a company specialized in manufacturing specialty gas for semiconductors and displays.
NF3 삼불화질소
Product details
| Product | Specification | |||
| Purity | Package | Valve | Filling Quantity | |
| NF3 | 4N | 47L | 22R | 20KG |
| Contaminants | Specifications |
| H2O | ≤2.0 ppmv |
| Acidity | ≤1.0 ppmv |
| N2 | ≤10.0 ppmv |
| O2 | ≤5.0 ppmv |
| CF4 | ≤40.0 ppmv |
| SF6 | ≤10.0 ppmv |
| CO | ≤5.0 ppmv |
| CO2 | ≤5.0 ppmv |
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2023-12-04 16:58
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